Series DMF - Digital Mass Flow Controllers
PHYSICAL DATA
Accuracy: ¡¾1% FS including linearity between 59 to 77¡ÆF (15 to 25¡ÆC) and
10 to 60 psia (0.7 to 4 bar); ¡¾2% FS from 32 to 122¡ÆF (0 to 50¡ÆC) and 5 to 150
psia (0.3 to 10 bar)
Repeatability: ¡¾15% of full scale.
Operating Temperature: 41 to 122¡ÆF (5 to 50¡ÆC)
Maximum Gas Pressure: 500 psig (34.5 bar).
Response Time: 0.6 to 1.0 second to within ¡¾2% of setpoint over 20% to 100% FS.
Power Supply: ¡¾15 VDC; 13.5 Watts maximum.
Output: Linear 0-5 VDC (2000 ohms min. load impedance); 0 to 10 VDC (4000 ohms min load
impedance).
Temperature Coefficient: 0.05% FS/¡ÆC or better.
Pressure Coefficient: 0.01% FS/psi (0.07 bar) or better.
Leak Integrity: 1 x 10-9; sccs of Helium.
Max. Particulate Size: 100 microns.
Computer Interface: RS-485
Process Connections: ¨ù" compression fitting for flow rates less than or equal to
50 L/min; 3/8" for flows greater than or equal to 60 L/min.
Wetted Parts: 316 stainless steel, 416 stainless steel, Vitron¢ç O-rings.
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